Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer

Hongcai Zhang, Xueyong Wei, Zhuangde Jiang. Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

Abstract

Abstract is missing.