An Optical MEMS Acoustic Sensor Based on Grating Interferometer

Mengying Zhang, Gaomi Wu, Dipeng Ren, Ran Gao, Zhimei Qi, Xingdong Liang. An Optical MEMS Acoustic Sensor Based on Grating Interferometer. Sensors, 19(7):1503, 2019. [doi]

Bibliographies