An Optical MEMS Acoustic Sensor Based on Grating Interferometer

Mengying Zhang, Gaomi Wu, Dipeng Ren, Ran Gao, Zhimei Qi, Xingdong Liang. An Optical MEMS Acoustic Sensor Based on Grating Interferometer. Sensors, 19(7):1503, 2019. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.