An Optical MEMS Acoustic Sensor Based on Grating Interferometer

Mengying Zhang, Gaomi Wu, Dipeng Ren, Ran Gao, Zhimei Qi, Xingdong Liang. An Optical MEMS Acoustic Sensor Based on Grating Interferometer. Sensors, 19(7):1503, 2019. [doi]

@article{ZhangWRGQL19,
  title = {An Optical MEMS Acoustic Sensor Based on Grating Interferometer},
  author = {Mengying Zhang and Gaomi Wu and Dipeng Ren and Ran Gao and Zhimei Qi and Xingdong Liang},
  year = {2019},
  doi = {10.3390/s19071503},
  url = {https://doi.org/10.3390/s19071503},
  researchr = {https://researchr.org/publication/ZhangWRGQL19},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {19},
  number = {7},
  pages = {1503},
}