Polarity Dependence and Metal Density Impact on Multi-Layer Inter-Level TDDB for High Voltage Application

Yinghong Zhao, Ki-Don Lee, Manisha Sharma, Joonah Yoon, Rakesh Ranjan, Md Iqbal Mahmud, Caleb Dongkyan Kwon, Myungsoo Yeo. Polarity Dependence and Metal Density Impact on Multi-Layer Inter-Level TDDB for High Voltage Application. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 1-4, IEEE, 2022. [doi]

Abstract

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