Gang Zhao, Yao Tian, Qiong Shu, Jing Chen. Evalution of bulk titanium DRIE Using SU-8 as soft mask. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 514-517, IEEE, 2009. [doi]
Abstract is missing.