Study of reactive ion etching process to fabricate the PMMA-based polymer waveguide

Y. Zhao, F. Wang, Z. C. Cui, J. Zheng, H. M. Zhang, D. M. Zhang, S. Y. Liu, M. B. Yi. Study of reactive ion etching process to fabricate the PMMA-based polymer waveguide. Microelectronics Journal, 35(7):605-608, 2004. [doi]

Abstract

Abstract is missing.