1/2 resolution silicon oscillating accelerometer with build-in Σ-Δ frequency-to-digital converter

Jian Zhao, Xi Wang, Yang Zhao, Guo Ming Xia, An Ping Qiu, Yan Su, Yong Ping Xu. 1/2 resolution silicon oscillating accelerometer with build-in Σ-Δ frequency-to-digital converter. In 2016 IEEE Symposium on VLSI Circuits, VLSIC 2016, Honolulu, HI, USA, June 15-17, 2016. pages 1-2, IEEE, 2016. [doi]

Authors

Jian Zhao

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Xi Wang

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Yang Zhao

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Guo Ming Xia

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An Ping Qiu

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Yan Su

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Yong Ping Xu

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