Jian Zhao, Xi Wang, Yang Zhao, Guo Ming Xia, An Ping Qiu, Yan Su, Yong Ping Xu. 1/2 resolution silicon oscillating accelerometer with build-in Σ-Δ frequency-to-digital converter. In 2016 IEEE Symposium on VLSI Circuits, VLSIC 2016, Honolulu, HI, USA, June 15-17, 2016. pages 1-2, IEEE, 2016. [doi]
Abstract is missing.