Fast and scalable parallel layout decomposition in double patterning lithography

Wei Zhao, Hailong Yao, Yici Cai, Subarna Sinha, Charles Chiang. Fast and scalable parallel layout decomposition in double patterning lithography. Integration, 47(2):175-183, 2014. [doi]

Authors

Wei Zhao

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Hailong Yao

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Yici Cai

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Subarna Sinha

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Charles Chiang

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