Fast and scalable parallel layout decomposition in double patterning lithography

Wei Zhao, Hailong Yao, Yici Cai, Subarna Sinha, Charles Chiang. Fast and scalable parallel layout decomposition in double patterning lithography. Integration, 47(2):175-183, 2014. [doi]

@article{ZhaoYCSC14,
  title = {Fast and scalable parallel layout decomposition in double patterning lithography},
  author = {Wei Zhao and Hailong Yao and Yici Cai and Subarna Sinha and Charles Chiang},
  year = {2014},
  doi = {10.1016/j.vlsi.2013.09.002},
  url = {http://dx.doi.org/10.1016/j.vlsi.2013.09.002},
  researchr = {https://researchr.org/publication/ZhaoYCSC14},
  cites = {0},
  citedby = {0},
  journal = {Integration},
  volume = {47},
  number = {2},
  pages = {175-183},
}