Meng Zhao, Qiancheng Zhao, Zhongjian Chen, Wengao Lu, Yacong Zhang, Guizhen Yan. A 0.084% Nonlinearity Open-Loop Capacitive Micro-Accelerometer with On-Chip Digital Nonlinearity Calibration and Embedded EEPROM. In IEEE International Symposium on Circuits and Systems, ISCAS 2021, Daegu, South Korea, May 22-28, 2021. pages 1-5, IEEE, 2021. [doi]
Abstract is missing.