The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions

Xueli Zhao, Zinan Zhao, Bin Wang, Zhenghua Qian, Tingfeng Ma. The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions. Sensors, 20(8):2408, 2020. [doi]

@article{ZhaoZWQM20,
  title = {The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions},
  author = {Xueli Zhao and Zinan Zhao and Bin Wang and Zhenghua Qian and Tingfeng Ma},
  year = {2020},
  doi = {10.3390/s20082408},
  url = {https://doi.org/10.3390/s20082408},
  researchr = {https://researchr.org/publication/ZhaoZWQM20},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {20},
  number = {8},
  pages = {2408},
}