The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions

Xueli Zhao, Zinan Zhao, Bin Wang, Zhenghua Qian, Tingfeng Ma. The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions. Sensors, 20(8):2408, 2020. [doi]

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