The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions

Xueli Zhao, Zinan Zhao, Bin Wang, Zhenghua Qian, Tingfeng Ma. The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions. Sensors, 20(8):2408, 2020. [doi]

Abstract

Abstract is missing.