AlGaN/GaN HEMTs with a magnetron-sputtered AlN buffer layer

Chunxiao Zhao, Ni Zeng, Bingzhi Zou, Qiao Sun, Jinyi Wang, Kejun Wei, Zeyu Huang, Tiankai Wang, Jingjing Lin, Yian Yin. AlGaN/GaN HEMTs with a magnetron-sputtered AlN buffer layer. Microelectronics Journal, 140:105926, October 2023. [doi]

Abstract

Abstract is missing.