Design and optimization of parylee nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing - researchr publication authors

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Qinglong Zheng, Zhuo Wang, Yong Xu. Design and optimization of parylee nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 449-453, IEEE, 2009. [doi]

This author has not been identified. Look up 'Qinglong Zheng' in GoogleThis author has not been identified. Look up 'Zhuo Wang' in GoogleThis author has not been identified. Look up 'Yong Xu' in Google

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