Qinglong Zheng, Zhuo Wang, Yong Xu. Design and optimization of parylee nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 449-453, IEEE, 2009. [doi]
@inproceedings{ZhengWX09-0,
title = {Design and optimization of parylee nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing},
author = {Qinglong Zheng and Zhuo Wang and Yong Xu},
year = {2009},
doi = {10.1109/NEMS.2009.5068616},
url = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068616},
tags = {optimization, design},
researchr = {https://researchr.org/publication/ZhengWX09-0},
cites = {0},
citedby = {0},
pages = {449-453},
booktitle = {4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009},
publisher = {IEEE},
isbn = {978-1-4244-4629-2},
}