Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production - researchr publication authors

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Qize Zhong, Yuan Dong, Dongdong Li, Nanxi Li, Ting Hu, Zhengji Xu, Yanyan Zhou, Keng Heng Lai, Yuan Hsing Fu, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, Navab Singh. Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production. In Optical Fiber Communications Conference and Exhibition, OFC 2020, San Diego, CA, USA, March 8-12, 2020. pages 1-3, IEEE, 2020. [doi]

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