Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production

Qize Zhong, Yuan Dong, Dongdong Li, Nanxi Li, Ting Hu, Zhengji Xu, Yanyan Zhou, Keng Heng Lai, Yuan Hsing Fu, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, Navab Singh. Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production. In Optical Fiber Communications Conference and Exhibition, OFC 2020, San Diego, CA, USA, March 8-12, 2020. pages 1-3, IEEE, 2020. [doi]

@inproceedings{ZhongDLLHXZLFBL30,
  title = {Large-Area Metalens Directly Patterned on a 12-Inch Glass Wafer using Immersion Lithography for Mass Production},
  author = {Qize Zhong and Yuan Dong and Dongdong Li and Nanxi Li and Ting Hu and Zhengji Xu and Yanyan Zhou and Keng Heng Lai and Yuan Hsing Fu and Vladimir Bliznetsov and Hou-Jang Lee and Wei Loong Loh and Shiyang Zhu and Qunying Lin and Navab Singh},
  year = {2020},
  url = {https://ieeexplore.ieee.org/document/9083600},
  researchr = {https://researchr.org/publication/ZhongDLLHXZLFBL30},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {Optical Fiber Communications Conference and Exhibition, OFC 2020, San Diego, CA, USA, March 8-12, 2020},
  publisher = {IEEE},
  isbn = {978-1-9435-8071-2},
}