Robust design of a MEMS gyroscope considering the worst-case tolerance

Hao Zhou, Hailin Tang, Wei Su, Xianxue Liu. Robust design of a MEMS gyroscope considering the worst-case tolerance. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1012-1016, IEEE, 2010. [doi]

Authors

Hao Zhou

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Hailin Tang

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Wei Su

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Xianxue Liu

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