Robust design of a MEMS gyroscope considering the worst-case tolerance

Hao Zhou, Hailin Tang, Wei Su, Xianxue Liu. Robust design of a MEMS gyroscope considering the worst-case tolerance. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 1012-1016, IEEE, 2010. [doi]

@inproceedings{ZhouTSL10,
  title = {Robust design of a MEMS gyroscope considering the worst-case tolerance},
  author = {Hao Zhou and Hailin Tang and Wei Su and Xianxue Liu},
  year = {2010},
  doi = {10.1109/NEMS.2010.5592587},
  url = {http://dx.doi.org/10.1109/NEMS.2010.5592587},
  researchr = {https://researchr.org/publication/ZhouTSL10},
  cites = {0},
  citedby = {0},
  pages = {1012-1016},
  booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
  publisher = {IEEE},
}