Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools

Qinghua Zhu, Yan Qiao, MengChu Zhou. Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster tools. In IEEE International Conference on Automation Science and Engineering, CASE 2015, Gothenburg, Sweden, August 24-28, 2015. pages 292-297, IEEE, 2015. [doi]

Abstract

Abstract is missing.