Integrated design of a secondary stage for magnetically levitated dual-stage positioning system - researchr publication authors

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Haiyue Zhu, Tat Joo Teo, Chee Khiang Pang, Wenyu Liang. Integrated design of a secondary stage for magnetically levitated dual-stage positioning system. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2017, Munich, Germany, July 3-7, 2017. pages 1340-1345, IEEE, 2017. [doi]

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