Qinghua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou. Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools. In 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013, Madison, WI, USA, August 17-20, 2013. pages 862-867, IEEE, 2013. [doi]
@inproceedings{ZhuWQZ13-0,
title = {Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools},
author = {Qinghua Zhu and Naiqi Wu and Yan Qiao and MengChu Zhou},
year = {2013},
doi = {10.1109/CoASE.2013.6653915},
url = {http://dx.doi.org/10.1109/CoASE.2013.6653915},
researchr = {https://researchr.org/publication/ZhuWQZ13-0},
cites = {0},
citedby = {0},
pages = {862-867},
booktitle = {2013 IEEE International Conference on Automation Science and Engineering, CASE 2013, Madison, WI, USA, August 17-20, 2013},
publisher = {IEEE},
}