Single-Crystalline Monolayer Mos2 Arrays Based High-Performance Transistors via Selective-Area CVD Growth Directly on Silicon Wafers

Guixu Zhu, Xiaodong Zhang, Haotian Fang, Dongdong Sun, Luyang Wang, Zujian Dai, Lizi Wei, Qiuyang Lin, Ao Li, Yufeng Min, Qiuxia Lu, Lixin He, Dongsheng Song, Yuanyuan Shi. Single-Crystalline Monolayer Mos2 Arrays Based High-Performance Transistors via Selective-Area CVD Growth Directly on Silicon Wafers. In IEEE Symposium on VLSI Technology and Circuits 2024, Honolulu, HI, USA, June 16-20, 2024. pages 1-2, IEEE, 2024. [doi]

Abstract

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