Qinghua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu. Scheduling Close-Down Processes Subject to Wafer Residency Constraints for Single-Arm Cluster Tools. In 2015 IEEE International Conference on Systems, Man, and Cybernetics, Kowloon Tong, Hong Kong, October 9-12, 2015. pages 521-526, IEEE, 2015. [doi]
Abstract is missing.