Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

Qinghua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu. Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 48(3):389-400, 2018. [doi]

@article{ZhuZQW18,
  title = {Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools},
  author = {Qinghua Zhu and MengChu Zhou and Yan Qiao and Naiqi Wu},
  year = {2018},
  doi = {10.1109/TSMC.2016.2598303},
  url = {https://doi.org/10.1109/TSMC.2016.2598303},
  researchr = {https://researchr.org/publication/ZhuZQW18},
  cites = {0},
  citedby = {0},
  journal = {IEEE Transactions on Systems, Man, and Cybernetics, Part A},
  volume = {48},
  number = {3},
  pages = {389-400},
}