The following publications are possibly variants of this publication:
- Modeling and Schedulability Analysis of Single-Arm Cluster Tools with Wafer Residency Time Constraints Using Petri NetNaiqi Wu, Chengbin Chu, Feng Chu, MengChu Zhou. icnsc 2008: 84-89 [doi]
- Petri net-based real-time scheduling of time-constrained single-arm cluster tools with activity time variationYan Qiao, Naiqi Wu, MengChu Zhou. icra 2012: 5056-5061 [doi]
- Petri net-based response policies to process module failure in time-constrained single-arm cluster toolsYan Qiao, Naiqi Wu, Chunrong Pan, MengChu Zhou. icnsc 2014: 144-149 [doi]
- 5SGraph Demo: A Graphical Modeling Tool for Digital LibrariesQinwei Zhu, Marcos André Gonçalves, Edward A. Fox. JCDL 2003: 385 [doi]
- Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant Atomic Layer Deposition ProcessesNaiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou. tase, 8(1):42-55, 2011. [doi]
- Modeling and Optimal Cyclic Scheduling of Time-Constrained Single-Robot-Arm Cluster Tools via Petri Nets and Linear ProgrammingFaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou, Rong Su, Ting Qu. tsmc, 50(3):871-883, 2020. [doi]
- Petri net modeling and one-wafer scheduling of single-arm tree-like multi-cluster toolsQinghua Zhu, Yan Qiao, MengChu Zhou. case 2015: 292-297 [doi]
- Petri net modeling and one-wafer scheduling of single-arm multi-cluster toolsQinghua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou. case 2013: 862-867 [doi]
- Petri net-based scheduling of time-constrained dual-arm cluster tools with bounded activity time variationNaiqi Wu, MengChu Zhou. case 2010: 465-470 [doi]
- Scheduling Close-Down Processes Subject to Wafer Residency Constraints for Single-Arm Cluster ToolsQinghua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu. SMC 2015: 521-526 [doi]