Qinglong Zheng, Zhuo Wang, Yong Xu. Design and optimization of parylee nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 449-453, IEEE, 2009. [doi]
Abstract is missing.