Journal: Proceedings of the IEEE

Volume 90, Issue 10

1614 -- 1619Phil Deluca. A review of thirty-five years of laser trimming with a look to the future
1620 -- 1626Yunlong Sun, Edward J. Swenson, Russ Barcey. Reducing photoelectric response when functionally trimming with lasers
1627 -- 1636Yunlong Sun. Laser link cutting for memory chip repair
1637 -- 1652Palash Das, Richard L. Sandstrom. Advances in excimer laser technology for sub-0.25-μm lithography
1653 -- 1669Paul C. Allen. Laser scanning for semiconductor mask pattern generation
1670 -- 1680Corey Dunsky. High-speed microvia formation with UV solid-state lasers
1681 -- 1688Kanti Jain, Marc Zemel, Marc Klosner. Large-area high-resolution lithography and photoablation systems for microelectronics and optoelectronics fabrication
1689 -- 1695Harry Shields, Steven W. Fornaca, Michael B. Petach, Rocco A. Orsini, Richard H. Moyer, Randall J. St Pierre. Laser-produced plasma light source for extreme ultraviolet lithography
1696 -- 1698Brian Bowers. Scanning our past from London-fluorescent lighting