Nanosheet field effect transistors-A next generation device to keep Moore's law alive: An intensive study

J. Ajayan, D. Nirmal, Shubham Tayal, Sandip Bhattacharya, L. Arivazhagan, A. S. Augustine Fletcher, P. Murugapandiyan, D. Ajitha. Nanosheet field effect transistors-A next generation device to keep Moore's law alive: An intensive study. Microelectronics Journal, 114:105141, 2021. [doi]

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