Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Nuria Barniol, Marc A. F. van den Boogaart, Juergen Brugger, Francesc Pérez-Murano. Nanomechanical mass sensor for monitoring deposition rates through confined apertures. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 94-97, IEEE, 2009. [doi]
@inproceedings{ArcamoneSVUABBBP09,
title = {Nanomechanical mass sensor for monitoring deposition rates through confined apertures},
author = {Julien Arcamone and Marc Sansa and Jaume Verd and Arantxa Uranga and Gabriel Abadal and Nuria Barniol and Marc A. F. van den Boogaart and Juergen Brugger and Francesc Pérez-Murano},
year = {2009},
doi = {10.1109/NEMS.2009.5068534},
url = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068534},
researchr = {https://researchr.org/publication/ArcamoneSVUABBBP09},
cites = {0},
citedby = {0},
pages = {94-97},
booktitle = {4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009},
publisher = {IEEE},
isbn = {978-1-4244-4629-2},
}