Nanomechanical mass sensor for monitoring deposition rates through confined apertures

Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Nuria Barniol, Marc A. F. van den Boogaart, Juergen Brugger, Francesc PĂ©rez-Murano. Nanomechanical mass sensor for monitoring deposition rates through confined apertures. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 94-97, IEEE, 2009. [doi]

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