Investigation of STI diodes as electrostatic discharge (ESD) protection devices in deep submicron (DSM) CMOS process

Thomas Au, Marek Syrzycki. Investigation of STI diodes as electrostatic discharge (ESD) protection devices in deep submicron (DSM) CMOS process. In 26th IEEE Canadian Conference on Electrical and Computer Engineering CCECE 2013, Regina, SK, Canada, May 5-8, 2013. pages 1-5, IEEE, 2013. [doi]

Abstract

Abstract is missing.