Impact of Si/Al implantation on the forming voltage and pre-forming conduction modes in HfO2 based OxRAM cells

M. Barlas, B. Traore, Laurent Grenouillet, Stefania Bernasconi, Philippe Blaise, M. Alayan, B. Sklenard, E. Jalaguier, P. Rodriguez, F. Mazen, E. Vilain, M. Guillermet, S. Jeannot, Elisa Vianello, Luca Perniola. Impact of Si/Al implantation on the forming voltage and pre-forming conduction modes in HfO2 based OxRAM cells. In 46th European Solid-State Device Research Conference, ESSDERC 2016, Lausanne, Switzerland, September 12-15, 2016. pages 168-171, IEEE, 2016. [doi]

Abstract

Abstract is missing.