Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization

T. BeauchĂȘne, D. Lewis, Felix Beaudoin, V. Pouget, Romain Desplats, Pascal Fouillat, Philippe Perdu, M. Bafleur, D. TrĂ©mouilles. Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization. Microelectronics Reliability, 43(3):439-444, 2003. [doi]

Abstract

Abstract is missing.