RF performance of Standard, High-Resistivity and Trap-Rich Silicon substrates down to cryogenic temperature

Q. Berlingard, M. Moulin, J.-P. Michel, T. Fache, I. Charlet, C. Plantier, Z. Chalupa, Jose Lugo-Alvarez, Jean-Pierre Raskin, Louis Hutin, Mikaël Cassé. RF performance of Standard, High-Resistivity and Trap-Rich Silicon substrates down to cryogenic temperature. In 53rd IEEE European Solid-State Device Research Conference, ESSDERC 2023, Lisbon, Portugal, September 11-14, 2023. pages 148-151, IEEE, 2023. [doi]

Abstract

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