Large area recrystallization of thick polysilicon films for low cost partial SOI power devices - researchr publication authors

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I. Bertrand, Jean-Marie Dilhac, P. Renaud, Christian Ganibal. Large area recrystallization of thick polysilicon films for low cost partial SOI power devices. Microelectronics Journal, 37(3):257-261, 2006. [doi]

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