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Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface

K. Biswas, S. Das, D. K. Maurya, S. Kal, S. K. Lahiri. Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface. Microelectronics Journal, 37(4):321-327, 2006. [doi]

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K. Biswas

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S. Das

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D. K. Maurya

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S. Kal

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S. K. Lahiri

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