K. Biswas, S. Das, D. K. Maurya, S. Kal, S. K. Lahiri. Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface. Microelectronics Journal, 37(4):321-327, 2006. [doi]
@article{BiswasDMKL06,
title = {Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface},
author = {K. Biswas and S. Das and D. K. Maurya and S. Kal and S. K. Lahiri},
year = {2006},
doi = {10.1016/j.mejo.2005.05.013},
url = {http://dx.doi.org/10.1016/j.mejo.2005.05.013},
tags = {rule-based},
researchr = {https://researchr.org/publication/BiswasDMKL06},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {37},
number = {4},
pages = {321-327},
}