Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface

K. Biswas, S. Das, D. K. Maurya, S. Kal, S. K. Lahiri. Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface. Microelectronics Journal, 37(4):321-327, 2006. [doi]

Abstract

Abstract is missing.