Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling

Peter Breitschopf, Guenther Benstetter, Bernhard Knoll, Werner Frammelsberger. Intermittent contact scanning capacitance microscopy-An improved method for 2D doping profiling. Microelectronics Reliability, 45(9-11):1568-1571, 2005. [doi]

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