LVI detection on passive structure in advance CMOS technology: New opportunities for device analysis

Guillaume Celi, Sylvain Dudit, Thierry Parrassin, Philippe Perdu, Antoine Reverdy, Dean Lewis, Michel Vallet. LVI detection on passive structure in advance CMOS technology: New opportunities for device analysis. Microelectronics Reliability, 51(9-11):1662-1667, 2011. [doi]

Abstract

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