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Facing the defect characterization and localization challenges of bridge defects on a submicronic technology (45 nm and below)

Guillaume Celi, Sylvain Dudit, Philippe Perdu, Antoine Reverdy, Thierry Parrassin, Emmanuel Bechet, Dean Lewis, Michel Vallet. Facing the defect characterization and localization challenges of bridge defects on a submicronic technology (45 nm and below). Microelectronics Reliability, 50(9-11):1499-1505, 2010. [doi]

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