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Performance improvement of InGaAs FinFET using NH3 treatment

Edward Yi Chang, Quang-Ho Luc, Huy-Binh Do, Yueh-Chin Lin. Performance improvement of InGaAs FinFET using NH3 treatment. In Yajie Qin, Zhiliang Hong, Ting-Ao Tang, editors, 12th IEEE International Conference on ASIC, ASICON 2017, Guiyang, China, October 25-28, 2017. pages 577-579, IEEE, 2017. [doi]

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Edward Yi Chang

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Quang-Ho Luc

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Huy-Binh Do

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Yueh-Chin Lin

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