Comparison of Two Optimization-Based Controllers for Feature Tracking SPM Scanning in Dual-Stage Nanopositioners

Yuhe Chang, William S. Nagel, Kam K. Leang, Sean B. Andersson. Comparison of Two Optimization-Based Controllers for Feature Tracking SPM Scanning in Dual-Stage Nanopositioners. In 2021 American Control Conference, ACC 2021, New Orleans, LA, USA, May 25-28, 2021. pages 4315-4320, IEEE, 2021. [doi]

Abstract

Abstract is missing.