Low-Temperature Wafer-Level Metal Bonding with Gold Thin Film at 100 °C

Po-Chih Chen, Demin Liu, Kuan-Neng Chen. Low-Temperature Wafer-Level Metal Bonding with Gold Thin Film at 100 °C. In 2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019. pages 1-4, IEEE, 2019. [doi]

Abstract

Abstract is missing.