C. K. Chung, Y. L. Chang, T. S. Chen. Influence of substrate bias on the resistivity and TCR of nanostructured Ta-Si-N films. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 551-554, IEEE, 2009. [doi]
Abstract is missing.