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Redundant via insertion in directed self-assembly lithography

Woohyun Chung, Seongbo Shim, Youngsoo Shin. Redundant via insertion in directed self-assembly lithography. In Luca Fanucci, Jürgen Teich, editors, 2016 Design, Automation & Test in Europe Conference & Exhibition, DATE 2016, Dresden, Germany, March 14-18, 2016. pages 55-60, IEEE, 2016. [doi]

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Woohyun Chung

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Seongbo Shim

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Youngsoo Shin

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